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How is Sulfuric Acid Cleaned to High Purity?

Air Products, KMG and General Chemical all produce ultra high purity sulfuric acid for clean application in the manufacturing of semiconductors. Does anyone know how the high purity sulfuric acid is produced? What is the technology or what is the process? Who are the suppliers of the cleaning technology?

Thanks,

Doug Weaver
Purchasing Manager - Elkhart, Indiana
November 24, 2010

The last that I knew, it was done with a very tightly controlled distillation process and a relatively clean acid to start with.

James Watts
- Navarre, Florida
November 26, 2010

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