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Etching a Ta/FeCo stack on silicon

Sir,

This is Rao from IIT Bombay. I would like to etch Ta (10 nm) /FeCo (20 nm) stack which is deposited on Silicon. Can you suggest me which chemicals are better to etch this Ta/FeCo stack. I wind like to create window by removing Ta/FeCo from Ta/FeCo/Silicon. The window size is 500nm X 20 um. Kindly suggest me about better etchant solutions with composition.

Thanking you
Rao.

Rao Adari
student - Mumbai, India
November 11, 2010

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