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Purpose of bias in PVD process

What is the main purpose of bias in PVD chambers like aluminium, titanium nitride. Explain

Padhukumar Padma
semiconductor - Singapore
March 3, 2009

March 4, 2009

Hi, Padhukumar. Everyone hates 'flash card' quizzes. Please explain your own situation in a way that we readers may learn something from you. Thanks!

Regards,

Ted Mooney, P.E.
Striving to live Aloha
finishing.com - Pine Beach, New Jersey

March 20, 2009

Bias serves several purposes. Some of them are

1. Substrate cleaning
2. Substrate heating
3. Provide mobility to the atoms/ions being deposited so that dense and void free films are deposited
4. Control the crystalline orientation or phase.

I am sure our learned readers can expand and elaborate.

H.R. Prabhakara - Consultant
Bangalore Plasmatek - Bangalore Karnataka India

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