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Sound technical content, curated with aloha by
Ted Mooney, P.E. RET
Pine Beach, NJ
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Measurement of tool temperature in Ion Nitriding





I would like to know the temperature measurement of tool in Ion Nitriding.
Whether Pyrometer or thermocouple which is the best and state the reason?

Geetha Sanjeevikumar
- Gummidipoondi, Tamil Nadu, India
2007



Thermocouple mounted in direct contact with substrate is best. Next best is next to substrate with equivalent surface area as substrate.
Reasoning: TC will give you direct reading and will not be affected by any emisistivity or transmisiion issues associated with indirect measuring with a pyrometer through a quartz port window (Which may have thin film deposits on it too) to the chamber.

Kevin Dowhower
- Lompoc, California, USA
2007



2007

Dear Geeta,

It is always better to have Thermocouple to have a good temp Reading.We can use pyrometer,but one has to set the emissivity values for different substrates.Advantage in pyrometer is ,one can able to measure Temp at any part during process.
Normally almost all industries are using Thermocouple for exact near (substrate) temp measurement.

Regards
Murali

A.Murali Krishna
A.Murali Krishna
pvd process engineer
Pune, India





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