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Any suggestion for a suitable Aluminum Etchant for silicon wafers?

2006

Dear All

I am looking for a Aluminum etchant for removing excess Aluminum from aluminum-silicon metallizations on silicon wafers.

Just to add, as it is a silicon wafer, using NaOH and KOH is a big 'NO'.

I tried PAN Solution (16:1:1:2) but etch was too slow and too inconsistent. I tried heating PAN to 70 - 90C, but still not a great deal of luck. Then, smut is also becoming a problem.

Please be kind enough to suggest a suitable etchant.

Regards,

Navneet Gupta
- New Delhi, Delhi, India

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