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Sound technical content, curated with aloha by
Ted Mooney, P.E. RET
Pine Beach, NJ

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Titanium Dry Etching

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Dear colleagues,

I would like to etch a thin (~30 nm) Titanium layer using CF4 or SF6 (without Cl's). Is somebody know where can I find the right parameters (base and gas pressures, power, oxygen, etch rate)?

Thank you,

David Katz
NJIT - Newark, New Jersey
2006

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