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Oil used in Diffusion pump of PVD Titanium Nitride machine

i am having 1 unit of 24 pieces Ti PVD Ti Nitride machine, recently we need to change the oil in the diffusion pump (the big vacumm pump above the heater), and we do not know what type of oil should be use in the diffusion pump.

We just take over the machine and the machine previously is using China made oil. And we cannot know further detail of oil type from China supplier.

I hope you can advice what type of oil should be use, as the machine is not working totally now.
Appreciate for your help.
thank in advance.
regards,

BS GOO
TiN coating - SP, Malaysia
2005

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Various d.p. oils (hydrocarbon, silicone, synthetic ester, polyphenyl ether) have different operating characteristics and prices as high as $675 per 500 cc. You must use an oil compatible with the diffusion pump, the rest of your vacuum system and end use. If you cannot obtain information from the pump manufacturer directly, search the Internet for the pump and machine brand. If no results, have the present oil analyzed.

Ken Vlach [deceased]
- Goleta, California
Finishing.com honored Ken for his countless carefully researched responses. He passed away May 14, 2015.
Rest in peace, Ken. Thank you for your hard work which the finishing world, and we at finishing.com, continue to benefit from.
2005