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Pine Beach, NJ

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EDX for Thickness Measurement

My I know the equation use to measure thickness using EDX. What are the parameters involved.

Azrul Faizal
Texas Instruments - Malaysia
2005

"My I know the equation use to measure thickness using EDX. What are the parameters involved."

By EDX are you referring to Energy Dispersive X-Ray? If so I'm not sure what equation you're looking for. Parameters for EDXRF would be the element(s) of the layer(s) of interest, and the substrate composition.

Jeff Marten
Meridian Analytical - Colorado Springs, Colorado, USA
2005

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