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How to etch Niobium oxide from thin Niobium films

2005

I have some very thin ( approx. 100nm ) niobium films, I would like to know what is the best way for etching the oxide layer (order 10 nm) that with the time it is deposit on these samples.

It is Hf chemical etching the right way to get rid of all the oxide ?

If yes can someone tell me what is the best way to do this, if no can someone tell me what is the best way to do this without damaging too much the films ?

Thank in advance

Giuseppe Tettamanzi
- Melbourne, Victoria, Australia

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