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Size of polishing particles vs. roughness of finish

Does smaller partical size of the polish yield better roughtness when using a cmp process
for example patical size of 100 nanometers compared with a polish of 30 nanometers.

Gordon Shiel
hobbyist - UK
2005

Consider polish abrasives as an ultra tiny plow. The smaller the plow, the smaller the furrow (scratch) is. The finer the particle, the finer (but slower) the finish will be.

James Watts
- Navarre, Florida
2005

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