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Ted Mooney, P.E. RET
Pine Beach, NJ

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Removal of thin Chrome layer from thin Moly part

I am trying to remove a thin Cr layer (~50um) from a thin (~0.002" thick) Mo mask that is used in the semiconductor industry. Can you recommend a chemical that will do this? We usually get these with a stack of Cr/Cu/Au/Pb/Sn, and use HCl to remove it. It takes 4-6 hours to remove as the acid undercuts. we are having problems with the straight Cr.

Kevin

Kevin Sidensol
- Austin, Texas
2005

Try with a low voltage (up to 6 Volts), reverse polarity (part positive), same acid (HCl), up to 6" distance, cathode graphite. This method is very fast, be carefull not to overstrip.

Guillermo Marrufo
Monterrey, NL, Mexico
2005

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