Sound technical content, curated with aloha by
Ted Mooney, P.E. RET
Pine Beach, NJ
The authoritative public forum
for Metal Finishing since 1989
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Want to etch SiO2 but not ZnO
Hi,
My substrate contains an array of SiO2 and ZnO. I wish to etch only the SiO2. After using concentrated HF, both SiO2 and ZnO disapeared. Is HF an etchant of ZnO as well? Can you suggest other suitable etchants?
student - Singapore
2004
Use Buffered Oxide Etch. (BOE) The solution consists of Ammonium fluoride, and Hydrofluoric acid.
Ted Eisenbach- Mountain Top, Pennsylvania, USA
2004
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