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Etching Tantalum
2004
I am having problems with etching Tantalum using 1:1 mixture of
0.5M EDTA and 30% Hydrogen peroxide (CMOS grade). I am performing this etch at 60 degree C. But still, I see my Tantalum film (400 A thickness) intact. Could anyone help me?
Thanks,
Student - Blacksburg, Virginia
You can visit http://kaker.com/etch/java/ website!
Goran Budija- Cerovski vrh Croatia
2004
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