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Anisotropic etching of aluminum

I am a student working on the fabrication of a MEMS pressure sensor. I looking for a way to perform anisotropic etching of Aluminum. What etchant can be used?

Sylvia Ziegler
student - Carmel, Indiana, US
2004

Try reactive Ion etching with BCl3, SiCl4,Cl2, N2 at 15 mTorr You should find exact data by searching the web.

Regards,

Marcus Hahn
- Switzerland
2004

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