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Stopping Calcium contamination of Electroless Nickel plated surface

2003

Hi,

I am using electroless Ni(high temperature process~500C) in my equipment for chemical vapor deposition of a film on Si wafers. I see high Ca contamination (range of few E10 atoms/cm2-TXRF analysis). I suspect strongly that this may be originating from my plating shop. Is there anyway I can absolutely eliminate any Ca containing compound from my plating bath?

Thanks,

ARJUN VENKATARAMAN
- Fremont, California

This may sound dumb but the only way to be absolutely sure you don't have calcium in your bath is to be absolutely sure you don't let any in. How to achieve this or how to get any traces out is another question. Depending on complexing agents used and other factors, it may even require dumping the bath.

Guillermo Marrufo
Monterrey, NL, Mexico
2003