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Tantalum etch

I am looking for a Tantalum etchant that would not etch Nickel. Can anyone help me out?

Thanks,

Lakshmikanth Namburi
- Austin, Texas

I've used 1:1 1M EDTA:H202 at 60C to remove Ta in the presence of Ni-Fe. It etches quite slow (~1000A/hr), so be patient.

David Arnold
Georgia Tech - Atlanta, GA, USA

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