Specs for Cleanroom

A reference: Basics of Cleanroom Design, Editors Fry and Skinner, 1988, Integrated Circuit Engineering Corp. Scottsdale AZ, phone 602-998-9780. This is of interest to finishers because I saw a plating shop designed around the Process Bay and Service Chase (tunnel, but don't make it a tunnel) design of a cleanroom; it was love at first sight. I almost applied for a job (that's what love does).

I used to work in class 10 and 100 clean rooms. So I think I deserve to shoot from my hip. I have two suggestions for desperate situations: try ASTM web page, www.astm.org and look for a spec; the other idea is blind-call to a wafer fab facility's manager then trace the right party. Wafer-fabs are supposed to have a spec on clean rooms.

The Standard you are look for is a FED-STD-209E.

The classification 1 is the highest standard which allows one particle at size of 0.5 microns per cubic foot of air! The classification 1A is not a recognized level.

Regards

AND YOU THINK YOU ARE GOING TO KEEP IT CLASS 1 AFTER PUTTING A PLATING LINE IN THERE? HAHAHAHAHAHAHAHAHAHAH!

I laugh because I am actually trying to do this now (class 100) with a closed plating tool.

good luck,
Dave,

If I may suggest...check http://www.semi.org for standards.
[...]

Good luck,
Mike

For the cleanroom design you can check the FED-STD-209E for the cleanroom testing you may follow the IEST-RP-CC006.3 (Institute of Environmental Sciences )

if your cleanroom want to save some money in insurance your cleanroom design need to check the NFPA (fire) 318.

APPROVAL FROM THE CHAIRMAN OF MECHANICAL ENGINEERING DEPARTMENT

===============================================================

Dear Sir/Madam,

These are the senior year full time graduate students of the Mechanical Engineering Department of the NED University of Engineering and Technology , Karachi , Pakistan. They are working hard for their senior year design project assigned to them as a major part of their senior year curriculum . Now as the Chairman of the Mechanical Engineering Department , I would request you to kindly provide them all the possible information they have requested from you , so that they can easily complete their final year Design project. I shall be grateful to you for your kind co-operation. Kindly send all the possible material at the address they have provided to you.

Thanking you,

Yours faithfully,

Hi, Dr. Mahmood, Mr. SIDDIQUI, and Fellow Students from Pakistan:

I hope someone here sends you something, but the specs and books referenced above are copyrighted, so no one here can send them. Hopefully a manufacturer will send you some literature. You may also contact the publisher of these materials and see if they will donate a copy to your school; you never know.

This website focuses on finishing, rather than cleanroom design, so you might try www.techexpo.com or www.semi.org. Or try a search engine for 'cleanroom' and 'magazine'; I saw plenty of hits.

As an introduction, there seem to be 6 design principles:

1. Use a service chase design so that things that don't have to be in the cleanroom, like pipes and valves, aren't.
2. Use non-dusting materials of construction like mylars rather than paper.
3. Design for laminar, downward, and outward flow.
4. Recycle the air through HEPA filters.
5. Try to achieve control in stages, rather than in one swoop: build a class 10,000 area, and off of that build a class 100 room, and inside that build a class 10 curtained-off area, rather than trying to put a class 10 curtained area directly in a grimy factory.
6. Try to get the people out of the room, because they are a major source of the contamination.

Sorry we couldn't do more for you. Good luck!

Waiting to exhale:

Plating students, brush up (no pun intended) on cleanrooms, and the world could be your oyster.
See the next letter- -

You might check with Jim Garner at SMC Technology in Tustin, CA. They make aluminum components for UHV applications.

You might be interested in my book Practical Cleanroom Design [onAmazonaffil links]. It has been well received and offers guidance to those charged with designing a cleanroom.