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Seeking Teflon impregnate/coat on aluminum oxide ceramic

 

I have an aluminum oxide ceramic "robot end effector" that is used in a semiconductor application to pick and place wafers. The part is a T-shape approximately 15" by 10". It is made of two sandwiched sheets of Al2O3, each 1mm thick, held together with a very thin epoxy (Epo-Tek 301). The surface finish appears to the naked eye and naked finger to be somewhat coarser than typical hardcoat anodize on MIC-6. We have some reason to believe that micron-size particles are being retained in the topography of the surface, and coming loose at just the wrong time. We are interested in a Teflon impregnation or coating, preferably by a supplier in the New England / Massachusetts area.

I don't know yet what temperature limitation is imposed by the epoxy. There are also small pads of Dupont Kalrez installed and mechanically retained, which actually contact the wafer, and these pads would probably have to be in place during the process: they have a maximum continuous service temperature of 316C.

There would probably be some masking involved on a flat surface; we have to apply a flex circuit with pressure-sensitive adhesive backing.

My preference is for an impregnation to fill the pores, if such a thing really exists; if a coating is all there is, I'd sure like a clear primer.

Jon F [last name deleted for privacy by Editor]
- N. Billerica, Massachusetts