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Components of anisotropic vs. isotropic etching

I know that the etchant used determines whether an etching process is either anisotropic or isotropic. If the etchant remains the same, do other components in the process have an effect in modifying or influencing this outcome? Specifically, how (if at all) do substrate, mask (type), mask (thickness), agitation, and duration of etching determine if the process will be anisotropic or isotropic?

Anna Hindes
artisan - Ft. Collins, Colorado
January 1, 2011

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