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Ted Mooney, P.E. RET
Pine Beach, NJ

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Electropolishing semiconductor wafers

Does anyone know about the feasibility of electropolishing semiconductor wafers?

Michael Liu Taylor
specialty stainless steel distributor - Dallas, Texas
1998

I think that the use of electropolishing implies that the surface to be treated must be somewhat conductive (copper, steel, gold, etc.).

Semiconductors would not fit the bill. They would more likely be chemically etched or polished without the use of electricity (unless you were trying to electropolish a conductive coating on the surface of the semiconductor wafer).

I hope this makes sense.

Bill Vins
microwave & cable assemblies - Mesa (what a place-a), Arizona
1997

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